Berkeley Lab Research Review
MICROTOOLS FOR THE NANOWORLD
By Paul Preuss
     

Great fleas have little fleas
upon their back to bite 'em.
And little fleas have lesser fleas,
and so ad infinitum.

- Augustus De Morgan

 
MICROMANAGEMENT

"If you're going to manipulate small things, you need small tools," says Keith Jackson. To build those, you have to start with tools that are a lot bigger.

Jackson, a physicist in the Materials Sciences Division's Center for X-Ray Optics (CXRO), heads the LIGA facility at the Advanced Light Source. LIGA (a German acronym for lithography, electroplating, and molding) burns patterns deep into a Plexiglas resist with hard x-rays; the resists are electroplated, then chemically removed, leaving master molds or individual devices-real 3-D machines and parts, not flat pieces like typical integrated circuits.

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